By Donhee Ham, Hakho Lee and Robert Westervelt
In recent times, there was a becoming curiosity in exploiting some great benefits of the ICs for components outdoors of the conventional software areas. One noteable quarter is located in biology Bioanalytical tools were miniaturized on ICs to check a variety of biophenomena or to actuate biosystems. those biolab-on-IC platforms make the most of the IC to facilitate swifter, repeatable, and standardized organic experiments at economical with a small quantity of organic sample. The examine actions during this box are anticipated to take pleasure in big progress within the foreseeable destiny. BioCMOS applied sciences experiences those fascinating fresh efforts in becoming a member of CMOS know-how with biology.
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Additional resources for CMOS Biotechnology (Series on Integrated Circuits and Systems)
A resist is spun onto a silicon or glass wafer. The resist is patterned with photolithography or electron beam lithography and developed. 1 Schematic diagrams showing the fabrication process for a simple microfluidic channel. Resist is spin-coated on a SiO2 substrate. The resist is then patterned with photolithography or electron beam lithography. Wet or reactive ion etching is used to transfer the pattern into the SiO 2 and the resist is removed. Finally, a SiO2 cover is bonded to the SiO2 substrate to encapsulate the channels.
5 Schematics showing a typical microfluidic device and a DNA separation experiment. (a) DNA is driven electrophoretically from one reservoir to another in the loading phase. (b) The electric field is switched to direct a plug of DNA in the intersection to move down along the separation channel. In DNA separation experiments, the separation channel is typically filled with a sieving matrix. DNA near the intersection but not launched in the plug is typically forced to move away from the intersection with an electric field.
A sacrificial film is deposited, spun, or grown on the surface of the substrate (examples of sacrificial layers include chrome, photoresist, or polysilicon). Lithography is used to pattern the sacrificial film. A capping layer is grown on the sacrificial film, which then has access holes patterned into it. Once the access holes are opened by wet or dry etching, the sacrificial layer is removed with an appropriate chemical etchant. Another film is then deposited to close the access holes and the microfluidic channels are complete.
CMOS Biotechnology (Series on Integrated Circuits and Systems) by Donhee Ham, Hakho Lee and Robert Westervelt